特點:
»適合產業: Solar Cell, Silicon Wafer, Touch Panel, Etc…
» 量測產品: Silicon wafer, conductive layer on glass/film and more, thin film (ito, izo, lcd, solar cell…)
» 量測範圍: 1m ~ 1G ohm/sq; 10.0μohm.cm ~ 10.0M ohm.cm
» 量測精度: 0.5% at KRISS Standard wafer, when 23℃
» 具2D/3D mapping 功能, 量測點位可設定
» 金屬膜厚度換算功能
» 晶圓尺寸: Max 12 inch wafer
» 高質感觸控面板顯示介面
